{"id":3673,"date":"2024-09-29T14:53:54","date_gmt":"2024-09-29T05:53:54","guid":{"rendered":"https:\/\/ramxeed.com\/jp\/home\/?post_type=column&p=3673"},"modified":"2025-12-22T10:47:48","modified_gmt":"2025-12-22T01:47:48","slug":"characteristics-of-pzt-used-in-feram","status":"publish","type":"column","link":"https:\/\/www.ramxeed.com\/jp\/tech-column\/characteristics-of-pzt-used-in-feram\/","title":{"rendered":"FeRAM\u306b\u4f7f\u7528\u3055\u308c\u308bPZT\u306e\u7279\u5fb4"},"content":{"rendered":"\n

\u5f53\u793eFeRAM\u88fd\u54c1\u306b\u304a\u3044\u3066\u60c5\u5831\u3092\u4fdd\u6301\u3059\u308b\u305f\u3081\u306b\u4f7f\u7528\u3055\u308c\u308b\u6750\u6599\u304c\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b(PZT\uff09\u3067\u3059\u3002PZT\u306f\u4e00\u822c\u7684\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u3066\u53d6\u308a\u6271\u3046\u3053\u3068\u304c\u96e3\u3057\u3044\u6750\u6599\u3067\u3042\u3063\u305f\u305f\u3081\u3001\u9577\u5e74FeRAM\u306e\u5b9f\u7528\u5316\u304c\u56f0\u96e3\u3067\u3057\u305f\u3002\u5f53\u793e\u306fPZT\u3092\u534a\u5c0e\u4f53\u88fd\u54c1\u306b\u7d44\u307f\u8fbc\u3080\u305f\u3081\u306e\u6280\u8853\u3092\u958b\u767a\u3057\u30011999\u5e74\u306b\u4e16\u754c\u306b\u5148\u99c6\u3051\u3066FeRAM\u306e\u91cf\u7523\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

PZT\u3068\u306f\u4f55\u304b<\/h2>\n\n\n\n

FeRAM\uff08ferroelectric random access memory\uff09\u306f\u3001\u30c7\u30b8\u30bf\u30eb\u30c7\u30fc\u30bf\u306e0\u30681\u3092\u8a18\u61b6\u3059\u308b\u6750\u6599\u306bPZT\uff08\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff09\u3092\u4f7f\u7528\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u306ePZT\u7d50\u6676\u69cb\u9020\u306e\u6700\u5c0f\u5358\u4f4d\uff08\u5358\u4f4d\u683c\u5b50\uff09\u306f\u3001\u4e0b\u8a18\u306e\u69d8\u306a\u69cb\u9020\u3067\u3059\u3002<\/p>\n\n\n

\n
\"PZT\uff08\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff09\u306e\u7d50\u6676\u69cb\u9020\"<\/figure>\n<\/div>\n\n\n

\u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff08Pb(Zr1\uff0dx<\/sub>,Ti x)O3<\/sub>\uff0cPZT\uff09\u306f\uff0c1950\u5e74\u524d\u5f8c\u306b\u6771\u4eac\u5de5\u696d\u5927\u5b66\u306e\u767d\u6839\u6559\u6388\u306b\u3088\u3063\u3066\u4e16\u754c\u3067\u521d\u3081\u3066\u5831\u544a\u3055\u308c\u305f\u5f37\u8a98\u96fb\u4f53\u3067\u3059\u3002 <\/p>\n\n\n\n

\u5f37\u8a98\u96fb\u4f53\u3068\u306f\u4f55\u304b<\/h2>\n\n\n\n

\u5f37\u8a98\u96fb\u4f53\u306f\u3001\u8a98\u96fb\u4f53\u306e\u3072\u3068\u3064\u3067\u3059\u304c\u3001\u4ed6\u306b\u5727\u96fb\u4f53\u3001\u7126\u96fb\u4f53\u3068\u3057\u3066\u306e\u6027\u8cea\u3082\u3082\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3089\u306e\u95a2\u4fc2\u306f\u4ee5\u4e0b\u306e\u56f3\u306e\u3088\u3046\u306b\u8868\u3055\u308c\u307e\u3059\u3002<\/p>\n\n\n

\n
\"\u5f37\u8a98\u96fb\u4f53\u3001\u7126\u96fb\u4f53\u3001\u5727\u96fb\u4f53\u3001\u8a98\u96fb\u4f53\u306e\u95a2\u4fc2\u306e\u56f3\"<\/figure>\n<\/div>\n\n\n

\u305d\u308c\u305e\u308c\u306e\u6750\u6599\u306e\u7279\u5fb4\u3092\u7c21\u5358\u306b\u8a18\u8f09\u3059\u308b\u3068\u3001\u4e0b\u8a18\u306e(a)\uff5e(d)\u306e\u69d8\u306b\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

(a)\u8a98\u96fb\u4f53<\/strong><\/p>\n\n\n\n

\u96fb\u6c17\u3092\u901a\u3055\u306a\u3044\u304c\u3001\u96fb\u5834\u306b\u7f6e\u304b\u308c\u305f\u3068\u304d\u306b\u5185\u90e8\u306e\u96fb\u8377\u3092\u84c4\u3048\u308b\u80fd\u529b\u3092\u3082\u3064\u7269\u8cea\u3067\u3059\u3002\u30b3\u30f3\u30c7\u30f3\u30b5\u30fc\u306a\u3069\u306b\u4f7f\u7528\u3055\u308c\u3001\u96fb\u6c17\u30a8\u30cd\u30eb\u30ae\u30fc\u3092\u8caf\u8535\u3059\u308b\u80fd\u529b\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

(b)\u5727\u96fb\u4f53<\/strong><\/p>\n\n\n\n

\u7269\u7406\u7684\u306a\u5727\u529b\u304c\u52a0\u308f\u308b\u3068\u96fb\u8377\u3092\u751f\u3058\u3001\u9006\u306b\u96fb\u5727\u3092\u52a0\u3048\u308b\u3068\u5f62\u72b6\u304c\u5909\u5316\u3059\u308b\u7269\u8cea\u3067\u3059\u3002\u30bb\u30f3\u30b5\u30fc\u3084\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u30fc\u306a\u3069\u306b\u5fdc\u7528\u3055\u308c\u307e\u3059\u3002\u30a2\u30af\u30c1\u30e5\u30a8\u30fc\u30bf\u30fc\u3068\u306f\u3001\u52d5\u529b\u6e90\u3068\u6a5f\u69cb\u90e8\u54c1\u3092\u7d44\u307f\u5408\u308f\u305b\u3066\u3001\u6a5f\u68b0\u7684\u306a\u52d5\u4f5c\u3092\u884c\u3046\u88c5\u7f6e\u306e\u3053\u3068\u3067\u3042\u308a\u3001\u4f8b\u3048\u3070\u30e2\u30fc\u30bf\uff08\u96fb\u52d5\u6a5f\uff09\u3082\u305d\u306e\u4e00\u7a2e\u3067\u3059\u3002<\/p>\n\n\n\n

(c)\u7126\u96fb\u4f53<\/strong><\/p>\n\n\n\n

\u6e29\u5ea6\u5909\u5316\u306b\u3088\u3063\u3066\u96fb\u8377\u304c\u751f\u3058\u308b\u7269\u8cea\u3067\u3001\u5e38\u306b\u3042\u308b\u7a0b\u5ea6\u306e\u5206\u6975\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002\u8d64\u5916\u7dda\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u306b\u4f7f\u308f\u308c\u307e\u3059\u3002<\/p>\n\n\n\n

(d)\u5f37\u8a98\u96fb\u4f53<\/strong><\/p>\n\n\n\n

\u96fb\u754c\u3092\u52a0\u3048\u308b\u3068\u5206\u6975\u3057\u3001\u96fb\u754c\u3092\u53d6\u308a\u9664\u3044\u3066\u3082\u305d\u306e\u5206\u6975\u304c\u6b8b\u308b\u6027\u8cea\u3092\u3082\u3064\u7269\u8cea\u3067\u3059\u3002\u30e1\u30e2\u30ea\u7d20\u5b50\u3084\u30bb\u30f3\u30b5\u30fc\u306a\u3069\u306b\u5229\u7528\u3055\u308c\u307e\u3059\u3002FeRAM\u306f\u3053\u306e\u6027\u8cea\u3092\u5229\u7528\u3057\u3066\u8a18\u61b6\u3092\u4fdd\u6301\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n

\u5f37\u8a98\u96fb\u4f53\u306f(a)\uff5e(d)\u306e\u8907\u6570\u306e\u7279\u6027\u3092\u6301\u3064\u304c\u3001\u3053\u308c\u3089\u5168\u3066\u3092\u5236\u5fa1\u3059\u308b\u5fc5\u8981\u304c\u3042\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

\u8a98\u96fb\u4f53\u8584\u819c\u3092\uff12\u3064\u306e\u96fb\u6975\u3067\u631f\u3093\u3060\u3082\u306e\u306b\u96fb\u5727\u3092\u304b\u3051\u3066\u3001\u8a98\u96fb\u4f53\u306e\u5206\u6975\u91cf\u3092\u6e2c\u5b9a\u3059\u308b\u3068\u3001\u4e0b\u8a18\u5de6\u56f3\u306e\u30b0\u30e9\u30d5\u3092\u5f97\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u4e00\u65b9\u3001\u8a98\u96fb\u4f53\u8584\u819c\u3092\u5f37\u8a98\u96fb\u4f53\u8584\u819c\u3092\u66ff\u3048\u3066\u307f\u308b\u3068\u3001\u4e0b\u8a18\u53f3\u56f3\u306e\u69d8\u306b\u306a\u308a\u307e\u3059\u3002\u5206\u6975\u91cf\u306f\u904e\u53bb\u306e\u5c65\u6b74\u306b\u4f9d\u5b58\u3057\u3066\u5909\u5316\u3057\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u3092\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u66f2\u7dda\u3068\u547c\u3073\u307e\u3059\u3002\u96fb\u6975\u96fb\u5727\u304c\u30bc\u30ed\u306e\u3068\u3053\u308d\u3067\u3001\u5206\u6975\u91cf\u306f\u6b63\u304b\u8ca0\u306e\u5024\u3092\u6301\u3061\u307e\u3059\u3002\u3053\u308c\u3089\u3092\u8a18\u61b6\u306e”1″\u307e\u305f\u306f”0″\u3068\u3057\u3066\u3001\u8a18\u61b6\u3092\u4fdd\u6301\u3057\u307e\u3059\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\uff08Hysteresis\uff09\u3068\u306f\u3001\u3042\u308b\u7cfb\u306e\u72b6\u614b\u304c\u3001\u73fe\u5728\u52a0\u3048\u3089\u308c\u3066\u3044\u308b\u529b\u3060\u3051\u3067\u306a\u304f\u3001\u904e\u53bb\u306b\u52a0\u308f\u3063\u305f\u529b\u306b\u4f9d\u5b58\u3057\u3066\u5909\u5316\u3059\u308b\u305f\u3081\u3001\u5c65\u6b74\u73fe\u8c61\u3001\u5c65\u6b74\u52b9\u679c\u3068\u3082\u547c\u3070\u308c\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n

\u3053\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u7279\u6027\u3092\u5229\u7528\u3057\u3066\u30e1\u30e2\u30ea\u7d20\u5b50\u3068\u3057\u3066\u6d3b\u7528\u3067\u304d\u308c\u3070\u3001DRAM\u306b\u4ee3\u308f\u308b\u6b21\u4e16\u4ee3\u30e1\u30e2\u30ea\u3068\u3067\u304d\u308b\u3053\u3068\u304c\u671f\u5f85\u3055\u308c\u3066\u3044\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001\u7406\u8ad6\u4e0a\u306f\u53ef\u80fd\u3067\u3042\u3063\u305f\u3082\u306e\u306e\u3001\u5b9f\u969b\u306b\u5b9f\u73fe\u3059\u308b\u3053\u3068\u306f\u975e\u5e38\u306b\u56f0\u96e3\u3067\u3042\u308b\u3053\u3068\u304c\u308f\u304b\u3063\u3066\u304d\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

\u5f37\u8a98\u96fb\u4f53\u304a\u3088\u3073\u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea\u958b\u767a\u306e\u6b74\u53f2<\/p>\n\n\n\n

\u5f37\u8a98\u96fb\u4f53\u304a\u3088\u3073\u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea\u306e\u6b74\u53f2\u306f\u4ee5\u4e0b\u306e\u3088\u3046\u306b\u306a\u308a\u307e\u3059\u3002PZT\u3092\u7528\u3044\u305f\u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea\u306f\u30011980\u5e74\u4ee3\u306b\u30a2\u30e1\u30ea\u30ab\u3067\u305d\u306e\u30d7\u30ed\u30c8\u30bf\u30a4\u30d7\u304c\u767a\u8868\u3055\u308c\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001PZT\u306f\u4e00\u822c\u7684\u306a\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u3066\u53d6\u308a\u6271\u3046\u3053\u3068\u304c\u96e3\u3057\u3044\u6750\u6599\u3067\u3042\u3063\u305f\u305f\u3081FeRAM\u306e\u91cf\u7523\u5316\u306f\u306a\u304b\u306a\u304b\u5b9f\u73fe\u3067\u304d\u307e\u305b\u3093\u3067\u3057\u305f\u3002\u5f53\u793e\u306fPZT\u3092\u534a\u5c0e\u4f53\u88fd\u9020\u5de5\u7a0b\u306b\u7d44\u307f\u8fbc\u3080\u6280\u8853\u3092\u958b\u767a\u3057\u30011999\u5e74\u306b\u4e16\u754c\u306b\u5148\u99c6\u3051\u3066FeRAM\u306e\u91cf\u7523\u306b\u6210\u529f\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n

\n
\"\"<\/figure>\n<\/div>\n\n\n
    \n
  • \u30ed\u30c3\u30b7\u30a7\u30eb\u5869\u306e\u5f37\u8a98\u96fb\u6027\u3092Valasek\u304c\u767a\u898b\u3002<\/strong>
    <\/strong>Valasek, J., 1920. Piezoelectric and allied phenomena in Rochelle salt. Phys. Rev., 17, pp.475\u2013481. DOI:10.1103\/PhysRev.17.475.<\/li>\n<\/ul>\n\n\n\n
      \n
    • 1954\u5e74\u9803\u306bPZT\u304c\u5f37\u8a98\u96fb\u4f53\u3067\u3042\u308b\u3053\u3068\u3092\u767a\u898b\u3002<\/strong>
      <\/strong>PZT\u306e\u7279\u6027\u306b\u7740\u76ee\u3057\u3001\u305d\u306e\u5fdc\u7528\u306b\u3064\u3044\u3066\u4e16\u754c\u3067\u7814\u7a76\u304c\u59cb\u307e\u308b\u3002PZT\u306f\u30b8\u30eb\u30b3\u30f3\u9178\u925b\uff08PbZrO3<\/sub>\uff09\u3068\u30c1\u30bf\u30f3\u9178\u925b\uff08PbTiO3<\/sub>\uff09\u306e\u6df7\u6676\u3067\u3001\u30b8\u30eb\u30b3\u30f3\uff08Zr\uff09\u3068\u30c1\u30bf\u30f3\uff08Ti\uff09\u306e\u6bd4\u7387\u304c0.52\u5bfe0.48\u306e\u3068\u3053\u308d\u3067\u5727\u96fb\u30bb\u30e9\u30df\u30c3\u30af\u30b9\u3068\u3057\u3066\u306e\u6027\u8cea\u304c\u6700\u5927\u306b\u306a\u308b\u3053\u3068\u304b\u3089\u3001\u3053\u306e\u4ed8\u8fd1\u306e\u7d44\u6210\u306ePZT\u304c\u4f7f\u308f\u308c\u308b\u3053\u3068\u304c\u591a\u3044\u3002\u5f53\u6642\u3001\u3057\u3070\u3089\u304f\u306e\u9593\u306f\u30e1\u30e2\u30ea\u7d20\u5b50\u306b\u8ee2\u7528\u3067\u304d\u308b\u3068\u306f\u8003\u3048\u3066\u3044\u306a\u304b\u3063\u305f\u3002<\/li>\n<\/ul>\n\n\n\n
        \n
      • 1988\u5e74\u9803\u3001\u7c73Krysalis\u793e\uff08\u5f53\u6642\uff09\u3001\u7c73Ramtron\u793e\uff08\u5f53\u6642\uff09\u304c\u3001PZT\u306e\u30e1\u30e2\u30ea\u30c7\u30d0\u30a4\u30b9\u3078\u306e\u5fdc\u7528\u306b\u3064\u3044\u3066\u767a\u8868\u3002<\/strong>
        <\/strong>PZT\u306f\u30ad\u30e5\u30ea\u30fc\u70b9(*)\u304c350\u2103\u3068\u9ad8\u304f\u3001\u5ba4\u6e29\u3067\u5341\u5206\u306b\u5927\u304d\u306a\u5f37\u8a98\u96fb\u6027\u3092\u5099\u3048\u3066\u3044\u305f\u305f\u3081\u3001\u5f37\u8a98\u96fb\u4f53\u4e0d\u63ee\u767a\u6027\u30e1\u30e2\u30ea\u306b\u8ee2\u7528\u3067\u304d\u308b\u3053\u3068\u304c\u793a\u5506\u3055\u308c\u3066\u304d\u305f\u3002\u305d\u306e\u305f\u3081\u30011980\u5e74\u4ee3\uff5e1990\u5e74\u4ee3\u306b\u304b\u3051\u3066\u958b\u767a\u3055\u308c\u305f\u5f37\u8a98\u96fb\u4f53\u4e0d\u63ee\u767a\u6027\u30e1\u30e2\u30ea\u306e\u5927\u534a\u304c\u63a1\u7528\u3057\u305f\u6750\u6599\u304c\u3001PZT\u3067\u3042\u3063\u305f\u3002\u3057\u304b\u3057\u3001\u958b\u767a\u306f\u9032\u3080\u3082\u306e\u306e\u91cf\u7523\u5b89\u5b9a\u6027\u306b\u8ab2\u984c\u304c\u6709\u308a\u5404\u793e\u3001\u8a66\u884c\u932f\u8aa4\u304c\u884c\u306a\u308f\u308c\u305f\u6642\u671f\u3067\u3082\u3042\u308b\u3002
        (*) \u30ad\u30e5\u30ea\u30fc\u70b9\u306f\u3001\u6750\u6599\u304c\u5f37\u8a98\u96fb\u6027\u3092\u5931\u3044\u3001\u5e38\u8a98\u96fb\u6027\u306b\u5909\u308f\u308b\u6e29\u5ea6\u306e\u3053\u3068\u3092\u8a00\u3044\u307e\u3059\u3002\u3053\u306e\u6e29\u5ea6\u3092\u8d85\u3048\u308b\u3068\u3001PZT\u306e\u7d50\u6676\u69cb\u9020\u304c\u5909\u5316\u3057\u3001\u5727\u96fb\u52b9\u679c\u3084\u5f37\u8a98\u96fb\u6027\u304c\u5931\u308f\u308c\u307e\u3059\u3002<\/li>\n<\/ul>\n\n\n\n
          \n
        • 1993\u5e74\u9803\u3001\u7c73Ramtron\u793e\uff08\u5f53\u6642\uff09\u304cFeRAM\u306e\u96c6\u7a4d\u5316\u306b\u6210\u529f\u3002<\/strong>
          <\/strong>\u3053\u308c\u306b\u7d9a\u304d\u3001\u5f0a\u793e\u3092\u542b\u3080\u56fd\u5185\u3001\u6d77\u5916\u30e1\u30fc\u30ab\u304cFeRAM\u306e\u91cf\u7523\u6280\u8853\u306e\u958b\u767a\u3092\u9032\u3081\u3001PZT\u306e\u57fa\u790e\u7279\u6027\u3001FeRAM\u306e\u88fd\u9020\u6280\u8853\u306b\u3064\u3044\u3066\u5b66\u4f1a\u767a\u8868\u3001\u77e5\u898b\u306e\u84c4\u7a4d\u304c\u76db\u3093\u306b\u884c\u306a\u308f\u308c\u305f\u3002\u3053\u306e\u904e\u7a0b\u3092\u7d4c\u3066\u3001FeRAM\u91cf\u7523\u306b\u304a\u3051\u308b\u3044\u304f\u3064\u304b\u306e\u8981\u7d20\u6280\u8853\u3001\u2460PZT\u819c\u53ca\u3073\u4e0a\u4e0b\u96fb\u6975\u5f62\u6210\u306e\u6700\u9069\u5316\u306b\u3088\u308b\u5f37\u8a98\u96fb\u4f53\u5bb9\u91cf\u7d20\u5b50\u306e\u5b89\u5b9a\u5f62\u6210\u3001\u2461\u5f37\u8a98\u96fb\u4f53\u5bb9\u91cf\u7d20\u5b50\u306e\u52a0\u5de5\u6280\u8853\u3001\u53ca\u3073\u2462\u65e2\u5b58\u534a\u5c0e\u4f53\u69cb\u9020\u3078\u306e\u7d44\u8fbc\u307f\u6280\u8853\u3001\u304c\u78ba\u7acb\u3055\u308c\u305f\u4e8b\u306b\u3088\u308a\u5b89\u5b9a\u91cf\u7523\u3078\u306e\u9053\u304c\u958b\u304b\u308c\u305f\u3002<\/li>\n<\/ul>\n\n\n\n
            \n
          • 1999\u5e7410\u6708\u3001\u5bcc\u58eb\u901a\u304b\u308964kb\u306e\u5927\u5bb9\u91cfFeRAM\u306e\u91cf\u7523\u51fa\u8377\u958b\u59cb<\/strong>
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