{"id":3687,"date":"2024-09-25T15:17:19","date_gmt":"2024-09-25T06:17:19","guid":{"rendered":"https:\/\/ramxeed.com\/jp\/home\/?post_type=column&#038;p=3687"},"modified":"2025-12-22T10:47:48","modified_gmt":"2025-12-22T01:47:48","slug":"sputter-deposition","status":"publish","type":"column","link":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/","title":{"rendered":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c"},"content":{"rendered":"\n<p class=\"has-text-align-center has-large-font-size\"><strong>PZT\u5f37\u8a98\u96fb\u4f53\u819c\u3092\u30b9\u30d1\u30c3\u30bf\u6210\u819c\u3057\u305f\u3044\u3001\u305d\u3046\u3060\u91cf\u7523\u88c5\u7f6e\u3064\u304f\u3063\u3061\u3083\u304a\u3046<\/strong><\/p>\n\n\n\n<p>FeRAM\u306f\u3001\u30c7\u30fc\u30bf\u4fdd\u5b58\u306b\u7528\u3044\u3089\u308c\u308b\u4e0d\u63ee\u767a\u6027\u30e1\u30e2\u30ea\u306e\u4e00\u7a2e\u3067\u3001\u305d\u306e\u7279\u6027\u304b\u3089\u5e83\u304f\u5229\u7528\u3055\u308c\u3066\u3044\u307e\u3059\u3002\u305d\u306eFeRAM\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u3001PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c\u306f\u91cd\u8981\u306a\u5de5\u7a0b\u3067\u3059\u3002\u3053\u3053\u3067\u306f\u3001FeRAM\u88fd\u9020\u306e\u6b74\u53f2\u3068\u5171\u306bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c\u306b\u95a2\u3059\u308b\u6280\u8853\u9769\u65b0\u306b\u3064\u3044\u3066\u898b\u3066\u3044\u304d\u307e\u3059\u3002<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">FeRAM\u306e\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u306e\u6982\u8981<\/h1>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"649\" src=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_01-1024x649.webp\" alt=\"\" class=\"wp-image-3688\" style=\"width:600px\" srcset=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_01-1024x649.webp 1024w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_01-300x190.webp 300w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_01-768x486.webp 768w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_01.webp 1200w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p>FeRAM(1)\u306f\u3001PZT\uff082\uff09\u5f37\u8a98\u96fb\u4f53\u819c\u3092\u4e0a\u4e0b\u306e\u96fb\u6975\u3067\u631f\u3093\u3060\u69cb\u9020\u3092\u6301\u3063\u3066\u3044\u307e\u3059\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u9ad8\u3044\u30c7\u30fc\u30bf\u4fdd\u5b58\u80fd\u529b\u3068\u9ad8\u901f\u306a\u66f8\u304d\u8fbc\u307f\u30fb\u8aad\u307f\u51fa\u3057\u304c\u53ef\u80fd\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>(1)FeRAM \uff1a Ferroelectric Random Access Memory \u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea&nbsp;<br>(2)PZT&nbsp; \uff1a lead zirconate titanate \u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">1999\u5e74\u306eFeRAM\u91cf\u7523\u306b\u5411\u3051\u305f\u8ab2\u984c<\/h1>\n\n\n\n<p>FeRAM\u306e\u91cf\u7523\u5316\u304c\u9032\u3080\u4e2d\u3001PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c\u65b9\u6cd5\u304c\u6ce8\u76ee\u3055\u308c\u307e\u3057\u305f\u3002\u5f53\u6642\u306f\u30be\u30eb\u30b2\u30eb\u6cd5(3)\u304c\u4e00\u822c\u7684\u3067\u3057\u305f\u304c\u3001\u3088\u308a\u91cf\u7523\u52b9\u7387\u306e\u9ad8\u3044\u30b9\u30d1\u30c3\u30bf\u6cd5(4)\u306e\u63a1\u7528\u304c\u6a21\u7d22\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n<p>(3)\u30be\u30eb\u30b2\u30eb\u6cd5 \uff1a \u30be\u30eb\u30b2\u30eb\u6cd5\u306f\u5316\u5b66\u7684\u306a\u6e7f\u5f0f\u6cd5\uff08\u6db2\u76f8\u6cd5\uff09\u306e\u4e00\u7a2e\u3067\u3001\u30be\u30eb\u72b6\u614b\uff08\u6db2\u4f53\u306b\u5206\u6563\u3057\u305f\u30b3\u30ed\u30a4\u30c9\u72b6\u306e\u7c92\u5b50\uff09\u304b\u3089\u30b2\u30eb\u72b6\u614b\uff08\u9023\u7d9a\u7684\u306a\u56fa\u4f53\u7db2\u76ee\u69cb\u9020\uff09\u3092\u7d4c\u3066\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5<\/p>\n\n\n\n<p>(4)\u30b9\u30d1\u30c3\u30bf\u6cd5&nbsp; \uff1a \u30b9\u30d1\u30c3\u30bf\u6cd5\u306f\u7269\u7406\u84b8\u7740\u6cd5\uff08PVD\uff1aPhysical Vapor Deposition\uff09\u306e\u4e00\u7a2e\u3067\u3001\u771f\u7a7a\u4e2d\u3067\u30d7\u30e9\u30ba\u30de\u3092\u5229\u7528\u3057\u3066\u30bf\u30fc\u30b2\u30c3\u30c8\u6750\uff08\u6210\u819c\u3057\u305f\u3044\u6750\u6599\uff09\u3092\u30b9\u30d1\u30c3\u30bf\uff08\u98db\u6563\uff09\u3055\u305b\u3001\u305d\u306e\u539f\u5b50\u3084\u5206\u5b50\u3092\u57fa\u677f\u4e0a\u306b\u5806\u7a4d\u3055\u305b\u3066\u8584\u819c\u3092\u5f62\u6210\u3059\u308b\u65b9\u6cd5\u3001PZT\u30bf\u30fc\u30b2\u30c3\u30c8\u306f\u7d76\u7e01\u7269\u3067\u3042\u308b\u305f\u3081\u3001\u30b9\u30d1\u30c3\u30bf\u6cd5\u3067\u4e00\u822c\u7684\u306a\u76f4\u6d41(DC)\u30d7\u30e9\u30ba\u30de\u3067\u306f\u306a\u304f\u3001\u9ad8\u5468\u6ce2(RF)\u30d7\u30e9\u30ba\u30de\u3092\u7528\u3044\u308b<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u91cf\u7523\u88c5\u7f6e\u306e\u958b\u767a\u30b9\u30c8\u30fc\u30ea\u30fc<\/h1>\n\n\n\n<p>\u5f53\u6642\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306f\u3001PZT\u306e\u819c\u7d44\u6210\u306e\u5236\u5fa1\u304c\u96e3\u3057\u304f\u3001\u30d7\u30e9\u30ba\u30de\u306e\u5b89\u5b9a\u5316\u3082\u8ab2\u984c\u3067\u3057\u305f\u3002\u305d\u3053\u3067\u3001\u88c5\u7f6e\u30e1\u30fc\u30ab\u30fc(ULVAC)\u3068\u306e\u5171\u540c\u958b\u767a\u306b\u3088\u308a\u3001\u30d7\u30e9\u30ba\u30de\u306e\u5b89\u5b9a\u5316\u3068\u819c\u7d44\u6210\u306e\u5236\u5fa1\u304c\u53ef\u80fd\u306a\u91cf\u7523\u88c5\u7f6e\u304c\u958b\u767a\u3055\u308c\u307e\u3057\u305f\u3002\u3053\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u306f\u3001\u4ee5\u4e0b\u306e\uff13\u3064\u306e\u8981\u7d20\u306b\u3088\u308a\u5b9f\u73fe\u3055\u308c\u307e\u3057\u305f(5)(6)(7)\u3002\u2460\u9ad8\u5bc6\u5ea6\u30bf\u30fc\u30b2\u30c3\u30c8\u306b\u3088\u308b\u30b9\u30d1\u30c3\u30bf\u5236\u5fa1\u3001\u2461\u30b7\u30fc\u30eb\u30c9\u96fb\u4f4d\u306b\u3088\u308b\u58c1\u9762\u5236\u5fa1\u3001\u2462\u9759\u96fb\u30c1\u30e3\u30c3\u30af\u306b\u3088\u308b\u6e29\u5ea6\u5236\u5fa1\u3002<\/p>\n\n\n\n<p>\u3053\u308c\u3089\u306e\u958b\u767a\u904e\u7a0b\u3067\u5f53\u793e\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u305f\u3061\u306f\u3001\u88c5\u7f6e\u306e\u5185\u90e8\u69cb\u9020\u3092\u5fb9\u5e95\u7684\u306b\u7406\u89e3\u3057\u3001\u6280\u8853\u9769\u65b0\u306b\u8ca2\u732e\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"649\" src=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02-1024x649.webp\" alt=\"\" class=\"wp-image-3690\" style=\"width:600px\" srcset=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02-1024x649.webp 1024w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02-300x190.webp 300w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02-768x487.webp 768w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02.webp 1200w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n<div class=\"wp-block-image\">\n<figure class=\"aligncenter size-large is-resized\"><img loading=\"lazy\" decoding=\"async\" width=\"1024\" height=\"649\" src=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_03-1024x649.webp\" alt=\"\" class=\"wp-image-3691\" style=\"width:600px\" srcset=\"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_03-1024x649.webp 1024w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_03-300x190.webp 300w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_03-768x487.webp 768w, https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_03.webp 1200w\" sizes=\"auto, (max-width: 1024px) 100vw, 1024px\" \/><\/figure>\n<\/div>\n\n\n<p>(5)&nbsp; K.Suu, T.Masuda, Y.Nishioka and N.Tani, \u201cProcess Stability Control of Pb(Zr,Ti)03 Ferroelectric Thin Film Sputtering for FRAM Application\u201d,&nbsp; Proceedings of the Eleventh IEEE International Symposium on Applications of Ferroelectrics, pp.19-22, 1998.<\/p>\n\n\n\n<p>(6) Koukou Suu, Akira Osawa, Yutaka Nishioka and Noriaki Tani, \u201cStability Control of Composition of RF-Sputtered Pb(Zr, Ti)O3 Ferroelectric Thin Film\u201d, Jpn.J.Appl.Phys. Vol.36, pp.5789-5792, 1997.<\/p>\n\n\n\n<p>(7) K. Hidaka, S. Hashiguchi, S. Nagayama and P. Kim, \u201cProperties of high-density (Pb, La) (Zr, Ti) O3 ceramics for sputtering target\u201d, Vacuum Vol.59, pp.451-458, 2000.<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u88c5\u7f6e\u306e\u6210\u679c\u3068\u4eca\u65e5\u3078\u306e\u5f71\u97ff<\/h1>\n\n\n\n<p>\u91cf\u7523\u88c5\u7f6e\u306e\u958b\u767a\u306b\u3088\u308a\u3001PZT\u306e\u819c\u7d44\u6210\u3092\u5236\u5fa1\u3057\u3084\u3059\u304f\u306a\u308a\u3001FeRAM\u306e\u54c1\u8cea\u5411\u4e0a\u304c\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002\u307e\u305f\u3001\u305d\u306e\u904e\u7a0b\u3067\u57f9\u308f\u308c\u305f\u6280\u8853\u306f\u3001\u4eca\u65e5\u3067\u3082FeRAM\u88fd\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u5f79\u5272\u3092\u679c\u305f\u3057\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<p>\u5f53\u793e\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u306f\u3001\u88c5\u7f6e\u306e\u4e2d\u8eab\u3092\u3057\u3063\u304b\u308a\u3068\u7406\u89e3\u3057\u3001\u91cf\u7523\u88c5\u7f6e\u306e\u958b\u767a\u306b\u3082\u7a4d\u6975\u7684\u306b\u95a2\u308f\u308a\u307e\u3057\u305f\u3002\u3053\u306e\u59ff\u52e2\u306f\u3001\u5f53\u793e\u306eDNA\u306e\u4e00\u90e8\u3068\u306a\u308a\u3001\u4eca\u65e5\u3067\u3082\u540c\u793e\u306e\u30a8\u30f3\u30b8\u30cb\u30a2\u305f\u3061\u306f\u3001\u88c5\u7f6e\u3092\u542b\u3081\u305f\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u3092\u4fef\u77b0\u3057\u3001\u554f\u984c\u89e3\u6c7a\u306b\u53d6\u308a\u7d44\u3093\u3067\u3044\u307e\u3059\u3002\u3053\u306e\u59ff\u52e2\u304c\u3001FeRAM\u88fd\u9020\u306b\u304a\u3051\u308b\u6280\u8853\u9769\u65b0\u306e\u539f\u52d5\u529b\u3068\u306a\u3063\u3066\u3044\u307e\u3059\u3002<\/p>\n\n\n\n<h1 class=\"wp-block-heading\">\u307e\u3068\u3081<\/h1>\n\n\n\n<p>FeRAM\u306e\u3082\u306e\u3065\u304f\u308a\u306f\u3001\u6280\u8853\u9769\u65b0\u3068\u6311\u6226\u306e\u9023\u7d9a\u3067\u3057\u305f\u3002\u904e\u53bb\u306e\u6210\u679c\u3092\u57fa\u306b\u3001\u4eca\u5f8c\u3082\u3055\u3089\u306a\u308b\u9032\u5316\u304c\u671f\u5f85\u3055\u308c\u307e\u3059\u3002\u82e5\u624b\u30a8\u30f3\u30b8\u30cb\u30a2\u3078\u306e\u6280\u8853\u4f1d\u627f\u3068\u5171\u306b\u3001FeRAM\u306e\u672a\u6765\u3092\u5207\u308a\u62d3\u3044\u3066\u3044\u304d\u307e\u3059\u3002<\/p>\n","protected":false},"author":15,"featured_media":3690,"template":"","tech_category":[320],"tech_tag":[325,331,333,334],"column_category":[274],"class_list":["post-3687","column","type-column","status-publish","has-post-thumbnail","hentry","tech_category-feram","tech_tag-feram","tech_tag-pzt","tech_tag-333","tech_tag-334","column_category-feram"],"acf":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v27.4 - https:\/\/yoast.com\/product\/yoast-seo-wordpress\/ -->\n<title>FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c | RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09<\/title>\n<meta name=\"description\" content=\"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\u3092\u89e3\u8aac\u3002PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308b\u6210\u819c\u6280\u8853\u958b\u767a\u306e\u6b74\u53f2\u3068\u8ab2\u984c\u514b\u670d\u306e\u904e\u7a0b\u3092\u8a73\u8ff0\u3002\u91cf\u7523\u88c5\u7f6e\u958b\u767a\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3084\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u8ca2\u732e\u3001\u6280\u8853\u4f1d\u627f\u306e\u91cd\u8981\u6027\u306b\u3082\u89e6\u308c\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, 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RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09\",\"isPartOf\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#website\"},\"primaryImageOfPage\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/#primaryimage\"},\"image\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/#primaryimage\"},\"thumbnailUrl\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/home\\\/wp-content\\\/uploads\\\/2024\\\/09\\\/01_02.webp\",\"datePublished\":\"2024-09-25T06:17:19+00:00\",\"dateModified\":\"2025-12-22T01:47:48+00:00\",\"description\":\"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\u3092\u89e3\u8aac\u3002PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308b\u6210\u819c\u6280\u8853\u958b\u767a\u306e\u6b74\u53f2\u3068\u8ab2\u984c\u514b\u670d\u306e\u904e\u7a0b\u3092\u8a73\u8ff0\u3002\u91cf\u7523\u88c5\u7f6e\u958b\u767a\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3084\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u8ca2\u732e\u3001\u6280\u8853\u4f1d\u627f\u306e\u91cd\u8981\u6027\u306b\u3082\u89e6\u308c\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002\",\"breadcrumb\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/#breadcrumb\"},\"inLanguage\":\"ja\",\"potentialAction\":[{\"@type\":\"ReadAction\",\"target\":[\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/\"]}]},{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/#primaryimage\",\"url\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/home\\\/wp-content\\\/uploads\\\/2024\\\/09\\\/01_02.webp\",\"contentUrl\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/home\\\/wp-content\\\/uploads\\\/2024\\\/09\\\/01_02.webp\",\"width\":1200,\"height\":761},{\"@type\":\"BreadcrumbList\",\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/sputter-deposition\\\/#breadcrumb\",\"itemListElement\":[{\"@type\":\"ListItem\",\"position\":1,\"name\":\"\u30db\u30fc\u30e0\",\"item\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/\"},{\"@type\":\"ListItem\",\"position\":2,\"name\":\"\u30c6\u30c3\u30af\u30b3\u30e9\u30e0\",\"item\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/tech-column\\\/\"},{\"@type\":\"ListItem\",\"position\":3,\"name\":\"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c\"}]},{\"@type\":\"WebSite\",\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#website\",\"url\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/\",\"name\":\"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09\",\"description\":\"RAMXEED\u306f\u3001\u9ad8\u6a5f\u80fd\u306e\u96fb\u5b50\u6a5f\u5668\u306b\u6b20\u304f\u3053\u3068\u306e\u3067\u304d\u306a\u3044\u9ad8\u54c1\u8cea\u30fb\u9ad8\u6027\u80fd\u306e\u30e1\u30e2\u30eaLSI\u3092\u3001\u6c38\u5e74\u306b\u308f\u305f\u3063\u3066\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002\",\"publisher\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#organization\"},\"potentialAction\":[{\"@type\":\"SearchAction\",\"target\":{\"@type\":\"EntryPoint\",\"urlTemplate\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/?s={search_term_string}\"},\"query-input\":{\"@type\":\"PropertyValueSpecification\",\"valueRequired\":true,\"valueName\":\"search_term_string\"}}],\"inLanguage\":\"ja\"},{\"@type\":\"Organization\",\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#organization\",\"name\":\"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09\",\"url\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/\",\"logo\":{\"@type\":\"ImageObject\",\"inLanguage\":\"ja\",\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#\\\/schema\\\/logo\\\/image\\\/\",\"url\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/home\\\/wp-content\\\/uploads\\\/2024\\\/09\\\/favicon-1.png\",\"contentUrl\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/home\\\/wp-content\\\/uploads\\\/2024\\\/09\\\/favicon-1.png\",\"width\":256,\"height\":256,\"caption\":\"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09\"},\"image\":{\"@id\":\"https:\\\/\\\/www.ramxeed.com\\\/jp\\\/#\\\/schema\\\/logo\\\/image\\\/\"}}]}<\/script>\n<!-- \/ Yoast SEO plugin. -->","yoast_head_json":{"title":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c | RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","description":"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\u3092\u89e3\u8aac\u3002PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308b\u6210\u819c\u6280\u8853\u958b\u767a\u306e\u6b74\u53f2\u3068\u8ab2\u984c\u514b\u670d\u306e\u904e\u7a0b\u3092\u8a73\u8ff0\u3002\u91cf\u7523\u88c5\u7f6e\u958b\u767a\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3084\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u8ca2\u732e\u3001\u6280\u8853\u4f1d\u627f\u306e\u91cd\u8981\u6027\u306b\u3082\u89e6\u308c\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002","robots":{"index":"index","follow":"follow","max-snippet":"max-snippet:-1","max-image-preview":"max-image-preview:large","max-video-preview":"max-video-preview:-1"},"canonical":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/","og_locale":"ja_JP","og_type":"article","og_title":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c | RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","og_description":"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\u3092\u89e3\u8aac\u3002PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308b\u6210\u819c\u6280\u8853\u958b\u767a\u306e\u6b74\u53f2\u3068\u8ab2\u984c\u514b\u670d\u306e\u904e\u7a0b\u3092\u8a73\u8ff0\u3002\u91cf\u7523\u88c5\u7f6e\u958b\u767a\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3084\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u8ca2\u732e\u3001\u6280\u8853\u4f1d\u627f\u306e\u91cd\u8981\u6027\u306b\u3082\u89e6\u308c\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002","og_url":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/","og_site_name":"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","article_modified_time":"2025-12-22T01:47:48+00:00","og_image":[{"width":1200,"height":761,"url":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02.webp","type":"image\/webp"}],"twitter_card":"summary_large_image","twitter_misc":{"\u63a8\u5b9a\u8aad\u307f\u53d6\u308a\u6642\u9593":"6\u5206"},"schema":{"@context":"https:\/\/schema.org","@graph":[{"@type":"WebPage","@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/","url":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/","name":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c | RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","isPartOf":{"@id":"https:\/\/www.ramxeed.com\/jp\/#website"},"primaryImageOfPage":{"@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/#primaryimage"},"image":{"@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/#primaryimage"},"thumbnailUrl":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02.webp","datePublished":"2024-09-25T06:17:19+00:00","dateModified":"2025-12-22T01:47:48+00:00","description":"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\u3092\u89e3\u8aac\u3002PZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308b\u6210\u819c\u6280\u8853\u958b\u767a\u306e\u6b74\u53f2\u3068\u8ab2\u984c\u514b\u670d\u306e\u904e\u7a0b\u3092\u8a73\u8ff0\u3002\u91cf\u7523\u88c5\u7f6e\u958b\u767a\u306e\u30d6\u30ec\u30fc\u30af\u30b9\u30eb\u30fc\u3084\u3001\u30a8\u30f3\u30b8\u30cb\u30a2\u306e\u8ca2\u732e\u3001\u6280\u8853\u4f1d\u627f\u306e\u91cd\u8981\u6027\u306b\u3082\u89e6\u308c\u308b\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002","breadcrumb":{"@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/#breadcrumb"},"inLanguage":"ja","potentialAction":[{"@type":"ReadAction","target":["https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/"]}]},{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/#primaryimage","url":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02.webp","contentUrl":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/01_02.webp","width":1200,"height":761},{"@type":"BreadcrumbList","@id":"https:\/\/www.ramxeed.com\/jp\/tech-column\/sputter-deposition\/#breadcrumb","itemListElement":[{"@type":"ListItem","position":1,"name":"\u30db\u30fc\u30e0","item":"https:\/\/www.ramxeed.com\/jp\/"},{"@type":"ListItem","position":2,"name":"\u30c6\u30c3\u30af\u30b3\u30e9\u30e0","item":"https:\/\/www.ramxeed.com\/jp\/tech-column\/"},{"@type":"ListItem","position":3,"name":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1a\u30b9\u30d1\u30c3\u30bf\u6cd5\u306b\u3088\u308bPZT\u5f37\u8a98\u96fb\u4f53\u819c\u306e\u6210\u819c"}]},{"@type":"WebSite","@id":"https:\/\/www.ramxeed.com\/jp\/#website","url":"https:\/\/www.ramxeed.com\/jp\/","name":"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","description":"RAMXEED\u306f\u3001\u9ad8\u6a5f\u80fd\u306e\u96fb\u5b50\u6a5f\u5668\u306b\u6b20\u304f\u3053\u3068\u306e\u3067\u304d\u306a\u3044\u9ad8\u54c1\u8cea\u30fb\u9ad8\u6027\u80fd\u306e\u30e1\u30e2\u30eaLSI\u3092\u3001\u6c38\u5e74\u306b\u308f\u305f\u3063\u3066\u63d0\u4f9b\u3057\u3066\u3044\u307e\u3059\u3002","publisher":{"@id":"https:\/\/www.ramxeed.com\/jp\/#organization"},"potentialAction":[{"@type":"SearchAction","target":{"@type":"EntryPoint","urlTemplate":"https:\/\/www.ramxeed.com\/jp\/?s={search_term_string}"},"query-input":{"@type":"PropertyValueSpecification","valueRequired":true,"valueName":"search_term_string"}}],"inLanguage":"ja"},{"@type":"Organization","@id":"https:\/\/www.ramxeed.com\/jp\/#organization","name":"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09","url":"https:\/\/www.ramxeed.com\/jp\/","logo":{"@type":"ImageObject","inLanguage":"ja","@id":"https:\/\/www.ramxeed.com\/jp\/#\/schema\/logo\/image\/","url":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/favicon-1.png","contentUrl":"https:\/\/www.ramxeed.com\/jp\/home\/wp-content\/uploads\/2024\/09\/favicon-1.png","width":256,"height":256,"caption":"RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09"},"image":{"@id":"https:\/\/www.ramxeed.com\/jp\/#\/schema\/logo\/image\/"}}]}},"_links":{"self":[{"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/column\/3687","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/column"}],"about":[{"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/types\/column"}],"author":[{"embeddable":true,"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/users\/15"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/media\/3690"}],"wp:attachment":[{"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/media?parent=3687"}],"wp:term":[{"taxonomy":"tech_category","embeddable":true,"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/tech_category?post=3687"},{"taxonomy":"tech_tag","embeddable":true,"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/tech_tag?post=3687"},{"taxonomy":"column_category","embeddable":true,"href":"https:\/\/www.ramxeed.com\/jp\/wp-json\/wp\/v2\/column_category?post=3687"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}