{"id":3698,"date":"2024-09-27T15:29:55","date_gmt":"2024-09-27T06:29:55","guid":{"rendered":"https:\/\/ramxeed.com\/jp\/home\/?post_type=column&p=3698"},"modified":"2025-12-22T10:47:48","modified_gmt":"2025-12-22T01:47:48","slug":"pzt-structure-protection","status":"publish","type":"column","link":"https:\/\/www.ramxeed.com\/jp\/tech-column\/pzt-structure-protection\/","title":{"rendered":"FeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1aPZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u4fdd\u8b77\u6280\u8853"},"content":{"rendered":"\n

\u8c46\u8150\u306e\u3088\u3046\u306b\u5d29\u308c\u308bPZT\u7d50\u6676\u69cb\u9020\u3001\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u3092\u5b88\u308b\u5f37\u3044\u5473\u65b9<\/strong><\/p>\n\n\n\n

FeRAM\u306e\u4e2d\u6838\u3092\u306a\u3059\u306e\u304c\u3001PZT\u5f37\u8a98\u96fb\u4f53\u819c\u3067\u3042\u308a\u3001\u3053\u306e\u819c\u3092\u5229\u7528\u3057\u305f\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u304c\u30e1\u30e2\u30ea\u7d20\u5b50\u3068\u3057\u3066\u6a5f\u80fd\u3057\u307e\u3059\u3002\u88fd\u9020\u5de5\u7a0b\u3067\u5fc5\u8981\u306a\u9ad8\u6e29\u51e6\u7406\u7b49\u304b\u3089\u3053\u306ePZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u3092\u4fdd\u8b77\u3059\u308b\u305f\u3081\u3001\u69d8\u3005\u306a\u65bd\u7b56\u304c\u8a66\u307f\u3089\u308c\u3001\u4fdd\u8b77\u6280\u8853\u304c\u78ba\u7acb\u3055\u308c\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

FeRAM\u306e\u88fd\u9020\u5de5\u7a0b\u6982\u8981<\/h2>\n\n\n
\n
\"\"<\/figure>\n<\/div>\n\n\n

FeRAM(1)\u306e\u88fd\u9020\u306f\u3001\u307e\u305aFEOL\uff08Front End of Line\uff09\u5de5\u7a0b\u3067\u30c8\u30e9\u30f3\u30b8\u30b9\u30bf\u3084\u62b5\u6297\u7d20\u5b50\u306a\u3069\u306e\u57fa\u672c\u7684\u306a\u90e8\u54c1\u3092\u5f62\u6210\u3057\u307e\u3059\u3002\u6b21\u306b\u30d5\u30a7\u30ed\u5de5\u7a0b\u3067\u306f\u3001PZT(2)\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u304c\u5f62\u6210\u3055\u308c\u307e\u3059\u3002\u305d\u3057\u3066\u3001\u6700\u5f8c\u306eBEOL\uff08Back End of Line\uff09\u5de5\u7a0b\u3067\u306f\u3001\u91d1\u5c5e\u914d\u7dda\u3084\u914d\u7dda\u9593\u30b3\u30f3\u30bf\u30af\u30c8\u304c\u5f62\u6210\u3055\u308c\u3001\u5b8c\u6210\u54c1\u3068\u306a\u308a\u307e\u3059\u3002<\/p>\n\n\n\n

(1)FeRAM \uff1a Ferroelectric Random Access Memory \u5f37\u8a98\u96fb\u4f53\u30e1\u30e2\u30ea <\/p>\n\n\n\n

(2)PZT  \uff1a lead zirconate titanate \u30c1\u30bf\u30f3\u9178\u30b8\u30eb\u30b3\u30f3\u9178\u925b <\/p>\n\n\n\n

PZT\u7d50\u6676\u69cb\u9020\u306e\u52a3\u5316<\/h2>\n\n\n\n

FeRAM\u306e\u88fd\u9020\u5de5\u7a0b\u3067\u5fc5\u8981\u306a\u9ad8\u6e29\u51e6\u7406\u306b\u3088\u308a\u3001PZT\u7d50\u6676\u69cb\u9020\u304c\u52a3\u5316\u3059\u308b\u554f\u984c\u304c\u751f\u3058\u307e\u3059\u3002\u7279\u306b\u3001\u9ad8\u6e29\u304b\u3064\u9084\u5143\u96f0\u56f2\u6c17\u4e0b\u3067\u306e\u51e6\u7406\u306b\u3088\u308a\u3001\u6c34\u7d20\u3084\u6c34\u306e\u62e1\u6563\u304c\u5f15\u304d\u8d77\u3053\u3055\u308c\u3001PZT\u7d50\u6676\u306ePb\u539f\u5b50\u3084O\u539f\u5b50\u304c\u5f15\u304d\u629c\u304b\u308c\u3001\u7d50\u6676\u69cb\u9020\u304c\u4e0d\u5b8c\u5168\u306a\u3082\u306e\u3068\u306a\u308a\u307e\u3059\u3002\u3053\u306e\u72b6\u614b\u3067\u306f\u3001FeRAM\u306e\u4fe1\u983c\u6027\u3084\u8010\u4e45\u6027\u304c\u8457\u3057\u304f\u640d\u306a\u308f\u308c\u3001\u88fd\u9020\u4e0a\u306e\u5927\u304d\u306a\u554f\u984c\u3068\u306a\u308a\u307e\u3059\u30021999\u5e74\u9803\u306e\u91cf\u7523\u521d\u671f\u6bb5\u968e\u3067\u306f\u3053\u306e\u554f\u984c\u304c\u9855\u8457\u3067\u3001\u5f53\u6642\u793e\u5185\u3067\u306f\u300c\u8c46\u8150\u306e\u3088\u3046\u306b\u5d29\u308c\u308bPZT\u69cb\u9020\u300d\u3068\u63f6\u63c4\u3055\u308c\u308b\u3053\u3068\u3082\u3042\u308a\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

PZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u4fdd\u8b77\u65bd\u7b56<\/h2>\n\n\n\n

\u3053\u306e\u554f\u984c\u306b\u5bfe\u51e6\u3059\u308b\u305f\u3081\u306b\u3001PZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u3092\u4fdd\u8b77\u3059\u308b\u305f\u3081\u306e\u4e3b\u306b\u4e8c\u3064\u306e\u65bd\u7b56\u3092\u8a66\u307f\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

    \n
  1. \u4e0a\u90e8\u96fb\u6975\u306e\u6750\u6599\u3084\u7d44\u6210\u3092\u5236\u5fa1\u3057\u3066\u3001\u52a3\u5316\u8010\u6027\u3092\u5f37\u5316\u3059\u308b\u3002<\/li>\n\n\n\n
  2. \u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u5468\u56f2\u306b\u4fdd\u8b77\u819c\u3092\u914d\u7f6e\u3057\u3066\u3001\u52a3\u5316\u8010\u6027\u3092\u5f37\u5316\u3059\u308b\u3002<\/li>\n<\/ol>\n\n\n\n

    1. \u4e0a\u90e8\u96fb\u6975\u306e\u6750\u6599\u3092\u767d\u91d1(Pt)\u304b\u3089\u30a4\u30ea\u30b8\u30a6\u30e0\u9178\u5316\u7269(IrOx)\u306b\u5909\u66f4\u3059\u308b\u3053\u3068\u3067\u3001\u6c34\u7d20\u306b\u3088\u308b\u52a3\u5316\u8010\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u307e\u3057\u305f(4)\u3002\u3055\u3089\u306b\u3001IrOx\u306e\u9178\u5316\u5ea6\u3092\u6700\u9069\u5316\u3059\u308b\u3053\u3068\u3067\u3001\u3088\u308a\u30ed\u30d0\u30b9\u30c8\u306a\u30d7\u30ed\u30bb\u30b9\u3092\u5b9f\u73fe\u3057\u307e\u3057\u305f(5)\u3002<\/p>\n\n\n

    \n
    \"\"
    \u56f32 \u6c34\u7d20\u30a2\u30cb\u30fc\u30eb\uff08150\u2103 60min H2(3%)\/N2\uff09\u524d\u5f8c\u306e\u30d2\u30b9\u30c6\u30ea\u30b7\u30b9\u30eb\u30fc\u30d7\u3001(a)\u4e0a\u90e8\u96fb\u6975\u304cPt\u3001(b)\u4e0a\u90e8\u96fb\u6975\u304cIrO2
    \u4e0a\u90e8\u96fb\u6975\u6750\u6599\u3092Pt\u304b\u3089IrO2\u306b\u5909\u66f4\u3059\u308b\u3053\u3068\u3067\u3001\u6c34\u7d20\u52a3\u5316\u8010\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a<\/figcaption><\/figure>\n<\/div>\n\n\n

    (4)\u9ad8\u4e95\u4ed6\u3001\u201d \uff7d\uff8a\uff9f\uff6f\uff80PZT\u3092\u7528\u3044\u305f0.5\uff90\uff78\uff9b\uff9d\u5f37\u8a98\u96fb\u4f53\uff92\uff93\uff98\uff70\u306e\u958b\u767a(2)\uff5ePb\u6fc3\u5ea6\u306eIrO2\/PZT\/Pt\uff8c\uff6a\uff9b\uff77\uff6c\uff8a\uff9f\uff7c\uff80\u7279\u6027\u3078\u306e\u5f71\u97ff\u201d\u79cb\u5b63\u5fdc\u7528\u7269\u7406\u5b66\u4f1a, 2000<\/p>\n\n\n\n

    (5) \u7279\u8a31\u7b2c4827653\u53f7<\/p>\n\n\n\n

    2. PZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u5468\u56f2\u30923\u91cd\u306b\u6c34\u7d20\u30d0\u30ea\u30a2\u819c\u3067\u56f2\u3080\u3053\u3068\u3067\u3082\u3001\u6c34\u7d20\u306b\u3088\u308b\u52a3\u5316\u8010\u6027\u304c\u5927\u5e45\u306b\u5411\u4e0a\u3057\u307e\u3057\u305f(6),(7)\u3002\u3053\u306e\u6280\u8853\u3092\u7528\u3044\u308b\u3053\u3068\u3067\u3001\u30ad\u30e3\u30d1\u30b7\u30bf\u9762\u7a4d\u304c0.4 um2\u306eFeRAM\u3092\u88fd\u9020\u3059\u308b\u3053\u3068\u304c\u53ef\u80fd\u3068\u306a\u308a\u307e\u3057\u305f\u3002<\/p>\n\n\n

    \n
    \"\"
    \u56f33 3\u91cd\u6c34\u7d20\u30d0\u30ea\u30a2\u69cb\u9020\u3092\u3082\u3064FeRAM
    (a) \u4e0a\u9762\u56f3\u3001(b) (a)\u56f3\u306eX-X’\u65b9\u5411\u306e\u65ad\u9762\u56f3<\/figcaption><\/figure>\n<\/div>\n\n\n

    \u56f33 3\u91cd\u6c34\u7d20\u30d0\u30ea\u30a2\u69cb\u9020\u3092\u3082\u3064FeRAM
    (a) \u4e0a\u9762\u56f3\u3001(b) (a)\u56f3\u306eX-X’\u65b9\u5411\u306e\u65ad\u9762\u56f3<\/p>\n\n\n\n

    (6) H. Saito, T. Sugimachi, K. Nakamura, S. Ozawa, N. Sashida, S. Mihara, Y. Hikosaka, W. Wang, T. Hori, K. Takai, M. Nakazawa, N. Kosugi, M. Okuda, M. Hamada, S. Kawashima, T. Eshita, and M. Matsumiya, IEEE Int. Memory Workshop 2015<\/p>\n\n\n\n

    (7) Takashi Eshita, Wensheng Wang, Kenji Nomura, Ko Nakamura, Hitoshi Saito, Hideshi Yamaguchi, Satoru Mihara, Yukinobu Hikosaka, Yuji Kataoka and Manabu Kojima, \u201cDevelopment of Highly Reliable Ferroelectric Random Access Memory and its Internet of Things Applications\u201d, Jpn. J. Appl. Phys Vol. 57, No.11S, pp. 11UA01-1-5, 2018<\/p>\n\n\n\n

    \u4fdd\u8b77\u6280\u8853\u306e\u78ba\u7acb\u306b\u3088\u308b\u6027\u80fd\u30fb\u4fe1\u983c\u6027\u5411\u4e0a<\/h2>\n\n\n\n

    \u3053\u308c\u3089\u306e\u65bd\u7b56\u3092\u7d44\u307f\u5408\u308f\u305b\u308b\u3053\u3068\u3067\u3001\u9ad8\u6e29\u74b0\u5883\u4e0b\u3067\u3082\u4fe1\u983c\u6027\u304c\u78ba\u4fdd\u3055\u308c\u308bFeRAM\u306e\u88fd\u9020\u304c\u5b9f\u73fe\u3057\u307e\u3057\u305f\u3002\u3053\u308c\u306b\u3088\u308a\u3001\u5e02\u5834\u3067\u306e\u7af6\u4e89\u529b\u304c\u5411\u4e0a\u3057\u3001FeRAM\u306e\u6027\u80fd\u3068\u4fe1\u983c\u6027\u304c\u5411\u4e0a\u3057\u307e\u3057\u305f\u3002<\/p>\n\n\n\n

    \u307e\u3068\u3081<\/h2>\n\n\n\n

    PZT\u7d50\u6676\u69cb\u9020\u306e\u4fdd\u8b77\u6280\u8853\u306f\u3001FeRAM\u306e\u88fd\u9020\u306b\u304a\u3044\u3066\u91cd\u8981\u306a\u8ab2\u984c\u3067\u3059\u3002\u5f53\u793e\u306f\u69d8\u3005\u306a\u65bd\u7b56\u306b\u3088\u308a\u3001FeRAM\u306e\u6027\u80fd\u3068\u4fe1\u983c\u6027\u3092\u5411\u4e0a\u3055\u305b\u3001\u4eca\u5f8c\u306e\u6280\u8853\u9769\u65b0\u306b\u5411\u3051\u305f\u57fa\u76e4\u3092\u7bc9\u304d\u4e0a\u3052\u307e\u3057\u305f\u3002<\/p>\n","protected":false},"author":15,"featured_media":3703,"template":"","tech_category":[320],"tech_tag":[325,331,336,329,334],"column_category":[274],"class_list":["post-3698","column","type-column","status-publish","has-post-thumbnail","hentry","tech_category-feram","tech_tag-feram","tech_tag-pzt","tech_tag-336","tech_tag-329","tech_tag-334","column_category-feram"],"acf":[],"yoast_head":"\nFeRAM\u306e\u88fd\u9020\u6280\u8853\u9769\u65b0\uff1aPZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u4fdd\u8b77\u6280\u8853 | RAMXEED\uff08\u30e9\u30e0\u30b7\u30fc\u30c9\uff09<\/title>\n<meta name=\"description\" content=\"FeRAM\u88fd\u9020\u6280\u8853\u306e\u9769\u65b0\uff1aPZT\u5f37\u8a98\u96fb\u4f53\u30ad\u30e3\u30d1\u30b7\u30bf\u306e\u4fdd\u8b77\u6280\u8853\u3092\u8a73\u89e3\u3002\u9ad8\u6e29\u51e6\u7406\u306b\u3088\u308b\u52a3\u5316\u554f\u984c\u3068\u305d\u306e\u89e3\u6c7a\u7b56\u3001\u4e0a\u90e8\u96fb\u6975\u6750\u6599\u306e\u6700\u9069\u5316\u3001\u591a\u5c64\u6c34\u7d20\u30d0\u30ea\u30a2\u819c\u306e\u958b\u767a\u306a\u3069\u3001\u6027\u80fd\u30fb\u4fe1\u983c\u6027\u5411\u4e0a\u306e\u79d8\u8a23\u3092\u7d39\u4ecb\u3002\u534a\u5c0e\u4f53\u88fd\u9020\u6280\u8853\u8005\u5fc5\u898b\u306e\u60c5\u5831\u6e90\u3002\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/www.ramxeed.com\/jp\/tech-column\/pzt-structure-protection\/\" \/>\n<meta property=\"og:locale\" content=\"ja_JP\" \/>\n<meta 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